| Scanning Electron Microscope |
|
|
| Serontech FESEM SEMIRON5000 |
Electron Gun Source : Schottky FE-Tip
Resolution : 1.0 nm @30KeV SE/2.0nm @BSE
Magnification : 10X ~1,000,000X
Image :
Secondary Electron Image SEI,
Backscattered Electron Image,
TSEM(Option)
Accelerating Voltage : ~30kV (Continuous Voltage Change)
Gun Alignment : Auto-Gun Alignment (Using Histogram)
Detector :
ET-Type SE Detector (SE-BSE image mode without BSEdetector
for uncoated sample inspection)& CCD
Stage Motorization :
5-Axis Motorized Stage
Auto-stepping & Tiling, Navigation & Retrieval Positioning
Options : BSE, EDS, WDS,EBSD,TSEM, Load-lock Chamber etc.
|
|
|
|
| Serontech Desktop mini SEM Aura100 |
• Accelerating Voltage (5~20kV for SI Photodiode BSE)
• Magnification : 30,000X with BSE Detector
(Additional Digital Zoom 2X, 4X, 8X)
• Auto-focus/Auto-Stigmator/Auto-Contrast-Brightness/
Auto-Gun Alignment & etc.
• Charge-up Reduction Mode
• Be Equipped with Powerful S/W
• Be Equipped with AOI Measurement Tool
|
|
|
|
| Serontech Desktop mini SEM Aura200 |
• Accelerating Voltage : 1kV~20kV
• Magnification: ~ Max. 60,000X
(Additional Digital Zoom-In 2X, 4X, 8X)
• Detector: SE Detector
• Auto-focus/Auto-Stigmator/Auto-Contrast-Brightness/
Auto-Gun Alignment
• Charge-up Reduction Mode
• Be Equipped with Powerful S/W
• Be Equipped with AOI Measurement Tool
|
|
|
|
| Serontech Compact SEM AIS1800C |
Resolution : 5.0 nm @20kV SE,4.0nm @30kV SE
Magnification : 10X ~200,000X (Max.) ( Digital Zoom 2X, 4X, 8X)
Accelerating Voltage : 0.6kV~30kV
Electron Gun Type : Tungsten Filament
Detector :
ET-Type SE Detector (SE-BSE Conversion Mode Without BSE detector for
Non-coating sample inspection)
Automation Function :
Auto-Gun Alignment , Auto-Focus, Auto-Stigmatism, Auto Contrast/
Brightness, Emission Current & etc
Stage Motorization :
Standard : 5-Axis Manual Stage
Option :3-Axis(X,Y,R)Motorized Stage. Position Retrieval
(Auto-Stepping & Tiling Function for wide FOV & Ultra Pixel
resolution)
Analysis Tool : EDS, BSE,TSEM, 3D Reconstruction S/W & etc.
|
|
|
|
| Serontech Compact SEM AIS2000C |
Resolution : 3.0 nm @20/30kV SE
Magnification : 10X ~300,000X (Max.) ( Digital Zoom 2X, 4X, 8X)
Accelerating Voltage : 0.6kV~30kV
Electron Gun Type : Tungsten Filament
Detector :
ET-Type SE Detector (SE-BSE Conversion Mode Without BSE detector for
Non-coating sample inspection)
Automation Function :
Auto-Gun Alignment , Auto-Focus, Auto-Stigmatism, Auto Contrast/
Brightness, Emission Current & etc
Stage Motorization :
Standard : 5-Axis Manual Stage
Option :3-Axis(X,Y,R)Motorized Stage. Position Retrieval
(Auto-Stepping & Tiling Function for wide FOV & Ultra Pixel
resolution)
Analysis Tool : EDS, BSE,TSEM, 3D Reconstruction S/W & etc.
|
|
|
|
| Serontech Normal SEM AIS2300C |
Resolution : 3.0 nm @30kV SE 4.0nm BSE
Magnification : 10X ~1,000,000X (Max.)
Accelerating Voltage : 0.6kV~30kV
Electron Gun Type : Tungsten Hair-pin Filament
Detector :
ET-Type SE Detector (SE-BSE Conversion Mode Without BSE detector for
Non-coating sample inspection)
Automation Function :
Auto-Gun Alignment , Auto-Focus, Auto-Stigmatism, Auto Contrast/
Brightness, Emission Current & etc
Stage Motorization :
Standard :3-Axis(X,Y,R)Motorized Stage. Position Retrieval
Auto-Stepping & Tiling Function for wide FOV & Ultra Pixel
resolution
Option :Additional Axis Motorization(T,Z) is available.
Analysis Tool : EDS, BSE,TSEM, 3D Reconstruction S/W. CCD Camera & etc.
|
|
|
|
| Serontech Normal SEM AIS2500C |
Electron Gun Source : LaB6 Filament Cathode
Resolution : 2 nm @ 30KeV SE /3nm @BSE
Magnification : 10X~ 1,000,000X
Accelerating Voltage : 0.6kV~30kV
Gun Alignment : Auto-Gun Alignment (Using Histogram)
Detector : ET-Type SE Detector (SE-BSE Conversion Mode Without
BSE Detector for Non-Coating Sample Inspection)
Automation Function :
Auto-Gun Alignment, Auto-Focus, Auto-Stigmatism, Auto Contrast/
Brightness, Emission Current Auto-stepping & Tiling, Auto
photograph by pre-setting etc.
Stage Motorization :
Standard: 3-Axis(X,Y,R) Motorized Stage
Position Retrieval (Auto-Stepping& Tiling Function forwide FOV &
Ultra Pixel resolution
Additional Axis Motorization(T,Z) is available
Option : BSE, EDS, WDS, EBSD, TSEM, Load-lock Chamber& etc.
|
|
|
|
| Serontech Review-SEM |
|
Desgin for customer |
|
|
|
| Serontech Hybrid Complex XEM |
High-resolution SEM imaging and X-RAY Hybrid equipment in one!
1) Possible nm resolution imaging in the implementation of the SEM
2) Convergence System with Realistic price
3) Sub-micron Spot Size and Probe current implementation of more than 100 uA max!
4) Target Spot ease of positioning of the micro-
5) Tungsten Target Metal apply; Target surface state of the sample can be observed
6) Faraday cage current through the probe check
7) Custom Fit Product for a research unit |
|
|
|
| Serontech NANO MANIPULATOR (FINGER) |
Apply for the Advanced Nano Manipulator of Switzerland & Germany
Are you working in the field of …
1) Material Research
2) Forensics / Crime research
3) Dimensional Quality Control
4) High Resolution Analysis
5) Tribology in-SEM Nanofabrication
6) Semiconductor development and production |
|
|
|
| Serontech 微區電子束焊接儀 AIW50 |
The world's first designed Hybrid Sub-Micron Joining System. It is also applicable to Nano welding.
1) SEM Mode by A few Nano Sized reolution.
2) Sub-micron Sized E-beam Joining Mode - (Max.Ip > 100uA)
3) Possible customizing application like chamber, stage, pump, loadlock and etc.
4) Compact Size & low keV Electron Gun.
5) Possible Manipulator attachment in Chamber.
6) Possible process observation by using BSE detector
|
|
|
|
| Serontech 電子束焊接儀 EBW |
SST & PTR -- Leading German supplier of the E-beam Welder
1) 30 KW, 60KW Electron Beam Power
2) Beam Sweep System
3) Beam Guidance System
4) Double Refraction System Defect Eliminates System
5) Electron –Optic System of Medium Power
6) Acceleration Voltage(Control System)
|
|
|
|
| Camscan Apollo 300 FEG-SEM |
Extreme probe current stability and extra-long lifetime electron gun
Adjustable accelerating voltage up to 30kV, upgradable to 50kV
Variable energy optics designed for high resolution imaging
Exceptional low magnification analysis ability(x3)
Through-lens detectors and in-chamber detectors equipped
Huge analysis chamber
16 ports for variable detectors and multi-functional analysis
6 axis eucentric stage for heavy samples up to 5kg
Variable chamber pressure
Various substages for various kinds of analysis
|
|
|
|
| Camscan CS series SEM |
Tungsten, LaB6 or FEG electron gun
Outside LaB6 position adjusting switch
Adjustable accelerating voltage up to 30kV, upgradable to 40kV and 50kV
Great probe current stability for electron beam lithography
Variable energy optics designed for high resolution imaging
Huge analysis chamber
16 ports for variable detectors and multi-functional analysis
6 axis eucentric stage for heavy samples up to 5kg
EnVac option for variable chamber pressure analysis
Various substages for various kinds of analysis
|
|
|
|
| Camscan X500 Crystal probe |
Schottky FEG electron gun
Extreme probe current stability and extra-long lifetime electron gun
Unique inclined column design
Horizontal sample placement to analyze melting samples and to solve sample clamping problems
High temperature analysis up to 1500 degree Celsius
Excellent thermal radiation shielding and sample evaporation protection
Multi-ports for EBSD, forward scattered, EDS, CL detections and so on
Low vacuum analysis for non-conducting samples
Various substages for various kinds of analysis
|
|
|
